METHOD FOR MANUFACTURING NITROGEN DOPED GRAPHENE GAS SENSOR AND GAS SENSOR MADE BY THE SAME

The present invention relates to a method for manufacturing nitrogen-doped graphene gas sensor, and a gas sensor manufactured thereby. The method of the present invention comprises the following steps of: forming graphene and doping nitrogen to graphene; and applying the graphene to a micro-heater i...

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Bibliographische Detailangaben
Hauptverfasser: LEE, JAI KWON, MAENG, SUNG LYUL
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention relates to a method for manufacturing nitrogen-doped graphene gas sensor, and a gas sensor manufactured thereby. The method of the present invention comprises the following steps of: forming graphene and doping nitrogen to graphene; and applying the graphene to a micro-heater installed on a substrate. 본 발명은 질소가 도핑된 그래핀 가스센서 제작방법 및 이를 통해 제작된 가스센서에 관한 것이다. 본 발명은 그래핀을 형성하고, 그래핀에 질소를 도핑하는 단계; 및 기판에 설치된 마이크로히터에 그래핀을 도포하는 단계를 포함한다.