SERVO PRESS SYSTEM WITH MULTI-DRIVING AXIS AND SYNCHRONOUS CONTROL METHOD USING THEREOF

The present invention relates to a multi-axial press system (1). With the present invention, each multi-axial servo mechanism can be individually position-controlled, and thus precise thickness control by position is possible and precision molding can be performed on new materials such as a wafer. T...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK, SANG HYUN, KIM, YUN CHANG, YOUN, HYUN SIK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PRESSES PRESSES IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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