APPARATUS FOR DETECTING CHARACTERISTICS AND DEFECT OF THIN-FILM

A thin film inspection device for measuring a characteristic and a defect of a thin film may comprise: a pulse laser for irradiating a pump beam for generating a surface wave on a thin film; an interferometer unit which has an interfering system including a light beam irradiated by a continuous wave...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK, HAE SUNG, KIM, JOO HAN, PARK, IK KEUN, KANG, DONG CHAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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