APPARATUS FOR DETECTING CHARACTERISTICS AND DEFECT OF THIN-FILM

A thin film inspection device for measuring a characteristic and a defect of a thin film may comprise: a pulse laser for irradiating a pump beam for generating a surface wave on a thin film; an interferometer unit which has an interfering system including a light beam irradiated by a continuous wave...

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Bibliographische Detailangaben
Hauptverfasser:	PARK, HAE SUNG, KIM, JOO HAN, PARK, IK KEUN, KANG, DONG CHAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A thin film inspection device for measuring a characteristic and a defect of a thin film may comprise: a pulse laser for irradiating a pump beam for generating a surface wave on a thin film; an interferometer unit which has an interfering system including a light beam irradiated by a continuous wave laser, and irradiates a probe beam for measuring the surface wave generated on the thin film; a reflection mirror for receiving the pump beam and probe beam, and coaxially reflecting the pump beam and probe beam; a scanning unit for receiving the pump beam and probe beam having been coaxially reflected, and irradiating the pump beam and probe beam to the thin film to scan the thin film; and a signal processing unit for measuring a characteristic and a defect of the scanned thin film. Therefore, the surface wave is generated in the thin film while scanning the thin film, and at the same time, the characteristics and defects of the thin film are measured. 박막의 특성 및 결함을 측정하는 박막 검사 장치는 박막에 표면파를 발생하기 위한 펌프빔(Pump beam)을 조사하는 펄스 레이저, 연속 발진 레이저로부터 조사된 광선으로부터 간섭계를 형성하여 박막에 발생된 표면파를 측정하는 프로브빔(Probe beam)을 조사하는 간섭계부, 펌프빔 및 프로브빔을 수광하고, 펌프빔 및 프로브빔을 동축으로 반사시키는 반사 미러 및 동축으로 반사된 펌프빔, 프로브빔을 수광하고, 박막에 펌프빔 및 프로브빔을 조사하여 박막을 스캔하는 스캐닝부 및 상기 스캔된 박막의 특성 및 결함을 측정하는 신호 처리부를 포함할 수 있다.