Plasma reactor power division system and power division method using the same

The present invention relates to a remote plasma chamber power distributing system and a power distributing method using the same and, more specifically, to a remote plasma chamber power distributing system and a power distributing method using the same capable of supplying RF power to a plurality o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK, DA RAE, KIM, YOUNG HYO, SEO, TAE WOOK, WANG, HYUN CHUL, LEE, NAE IL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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