Apparatus for Lifting Substrate of Mask Aligner

The present invention relates to a substrate lifting apparatus, comprising: a variable lift pin for supporting a substrate; a pin plate installed to be raised and lowered; a raising/lowering portion for raising or lowering the pin plate; and a converting portion for converting between a support mode...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BAE, YEONG JAE, HAN, KYONG JUN, KIM, JIN CHEOL, SEO, HAN GI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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