Apparatus for Lifting Substrate of Mask Aligner
The present invention relates to a substrate lifting apparatus, comprising: a variable lift pin for supporting a substrate; a pin plate installed to be raised and lowered; a raising/lowering portion for raising or lowering the pin plate; and a converting portion for converting between a support mode...
Gespeichert in:
| Hauptverfasser: | , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; kor |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | The present invention relates to a substrate lifting apparatus, comprising: a variable lift pin for supporting a substrate; a pin plate installed to be raised and lowered; a raising/lowering portion for raising or lowering the pin plate; and a converting portion for converting between a support mode and a release mode. In the support mode, the converting portion is supported by the pin plate such that the variable lift pin is raised or lowered in accordance with the pin plate being raised or lowered so as to support the substrate. In the release mode, the pin plate is independently raised or lowered with respect to the variable lift pin such that the converting portion is support-released with respect to the pin plate.
본 발명은 기판을 지지하기 위한 가변리프트핀; 승하강 가능하도록 설치된 핀플레이트; 상기 핀플레이트를 승하강시키기 위한 승강부; 및 상기 핀플레이트가 승하강함에 따라 상기 가변리프트핀이 승하강하여 상기 기판을 지지하도록 상기 핀플레이트에 지지되는 지지모드 및 상기 핀플레이트가 상기 가변리프트핀에 대해 독립적으로 승하강하도록 상기 핀플레이트에 대해 지지 해제되는 해제모드 간에 전환되는 전환부를 포함하는 기판 리프트 장치에 관한 것이다. |
|---|