Deposition Apparatus with Blocking Layer

The present invention relates to a deposition apparatus with a blocking layer which enables a spray angle of a deposition material not to be changed by sediment accumulated in the blocking layer. When the deposition material is deposited in an upper end of the blocking layer, the deposition material...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, JEONG TAEK, PARK, HYUN SIK
Format: Patent
Sprache:eng ; kor
Schlagworte:
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Beschreibung
Zusammenfassung:The present invention relates to a deposition apparatus with a blocking layer which enables a spray angle of a deposition material not to be changed by sediment accumulated in the blocking layer. When the deposition material is deposited in an upper end of the blocking layer, the deposition material is removed or moved not to randomly change a spray angle of the deposition material. Therefore, the deposition material sprayed from a nozzle can be easily gasified in a direction of a substrate at a predetermined angle. 본 발명은 차단막에 쌓이는 퇴적물에 의하여 증착 물질의 분사 각도가 변경되지 않도록 하는 차단막을 갖는 증착 장치에 관한 것으로, 차단막의 상단에 증착물질이 퇴적되면, 증착물질을 제거 또는 이동시켜서 증착물질의 분사각도가 임의로 변경되지 않도록 하고, 이에 따라 노즐에서 분사되는 증착물질이 기 설정된 각도로 용이하게 기판 방향으로 기화시킬 수 있게 되는 효과가 있다.