PRESSURE SENSOR USING VACCUM DISCHARGE TUBE

The present invention relates to a pressure sensor using a vacuum discharge tube, capable of accurately measuring pressure through a discharge color and a discharge current of the vacuum discharge tube. According to one embodiment of the present invention, the pressure sensor includes: a vacuum flan...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEE, HAG WON, YOON, SAE WON, KIM, YOON BAE, PARK, SEUNG NAM, BAE, MOON SEOB, HONG, SEUNG SOO
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention relates to a pressure sensor using a vacuum discharge tube, capable of accurately measuring pressure through a discharge color and a discharge current of the vacuum discharge tube. According to one embodiment of the present invention, the pressure sensor includes: a vacuum flange having a cylindrical shape formed therein with a hollow, formed at one surface thereof with a first coupling groove, and formed at an opposite end thereof with a second coupling groove facing the first coupling groove; a vacuum discharge tube disposed within the hollow of the vacuum flange, and including a first electrode coupled to the first coupling groove and a second electrode coupled to the second coupling groove to cause a discharge when a high voltage is applied to the first electrode and the second electrode; and a control unit for measuring the pressure inside the vacuum discharge tube, wherein the control unit calculates the pressure inside the vacuum discharge tube based on one of a color, a shape, and a discharge current of the discharge occurring inside the vacuum discharge tube. 본 발명은 진공방전관을 이용한 압력센서에 관한 것으로서, 본 발명의 일 실시예에 따른 압력센서는 내부가 중공된 원기둥 형상으로 형성되고, 일면에 형성된 제 1 결합홈 및 상기 제 1 결합홈과 대향하고, 타단에 형성된 제 2 결합홈을 포함하는 진공플랜지; 상기 진공플랜지의 중공된 내부에 배치되며, 상기 제 1 결합홈에 결합되는 제 1 전극 및 상기 제 2 결합홈에 결합되는 제2 전극을 포함하고, 상기 제 1 전극 및 제 2 전극에 고전압이 가해지면 방전을 일으키는 진공방전관; 및 상기 진공방전관 내부의 압력을 측정하는 제어부를 포함하되, 상기 제어부는 진공방전관 내부의 발생된 방전의 색, 모양, 및 방전 전류 중 어느 하나에 기초하여 상기 진공방전관 내부의 압력을 산출하는 것을 특징으로 한다.