ELECTROSTATIC CHUCK AND ELECTROSTATIC ADSORPTION APPARATUS

An electrostatic chuck comprises: a main body portion including a body portion including a penetration hole and a transparent resin portion filled in the penetration hole; a transparent cushion layer located in the main body portion and covering the transparent resin portion; an electrode layer loca...

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Bibliographische Detailangaben
Hauptverfasser:	BAE, MIN HO, KIM, BYUNG MOO, KIM, YUN SOO, YOUN, TAE HO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	An electrostatic chuck comprises: a main body portion including a body portion including a penetration hole and a transparent resin portion filled in the penetration hole; a transparent cushion layer located in the main body portion and covering the transparent resin portion; an electrode layer located on the transparent cushion layer; and a dielectric layer located on the electrode layer, thereby capable of easily aligning an adsorbate. 정전 척은 관통홀을 포함하는 바디부 그리고 상기 관통홀에 채워진 투명 수지부를 포함하는 본체부, 상기 본체부 상에 위치하며 상기 투명 수지부를 덮는 투명 쿠션층, 상기 투명 쿠션층 상에 위치하는 전극층, 그리고 상기 전극층 상에 위치하는 유전층을 포함한다.