METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

A method for manufacturing a semiconductor device according to an embodiment of the present invention includes the steps of: forming a mold structure including alternately stacked mold insulating layers and sacrificial layers on a substrate; forming a vertical structure by passing through the mold s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM, BI O, CHO, YONG SEOK, KIM, JUNG HO, LEE, SUNG HAE, KIM, HYUNG JOON, RA, JOONG YUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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