Apparatus for transferring using the integrated circuit device fabricating
The present invention relates to a transfer apparatus for manufacturing an integrated circuit device, which comprises: a rail provided on the upper portion of a manufacture line to manufacture an integrated circuit device; and a wheel driven along the rail. Moreover, the transfer apparatus for manuf...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; kor |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | The present invention relates to a transfer apparatus for manufacturing an integrated circuit device, which comprises: a rail provided on the upper portion of a manufacture line to manufacture an integrated circuit device; and a wheel driven along the rail. Moreover, the transfer apparatus for manufacturing an integrated circuit device may include a particle collection unit prepared on a side surface of the rail to collect particles produced as the wheel is rubbed against a driving unit when the wheel is driven in the rail.
집적회로 소자를 제조하는 제조 라인 상부에 구비되는 레일 및 상기 레일을 따라 주행하는 휠을 포함하는 집적회로 소자 제조용 이송 장치에 있어서, 상기 레일을 상기 휠이 주행함에 따라 상기 주행부와 상기 휠이 마찰함으로서 발생하는 파티클을 포집하도록 상기 레일 측면에 구비되는 파티클 포집부를 포함할 수 있다. |
|---|