SELF-CENTERING PEDESTAL HEATER

A pedestal is provided that includes a body, a heater embedded in the body, a support pocket formed within the body having a surface disposed in a first plane, a peripheral surface disposed in a second plane surrounding the support pocket, and a plurality of centering tabs positioned between the sup...

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Bibliographische Detailangaben
Hauptverfasser:	GADRE MILIND, KIM SAM H, BALUJA SANJEEV, ZHANG YUXING
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A pedestal is provided that includes a body, a heater embedded in the body, a support pocket formed within the body having a surface disposed in a first plane, a peripheral surface disposed in a second plane surrounding the support pocket, and a plurality of centering tabs positioned between the support pocket and the peripheral surface, each of the centering tabs having a surface disposed in a third plane that is between both of the first and second planes. 본체, 본체에 매립된 가열기, 제 1 평면에 배치된 표면을 갖는, 본체 내에 형성된 지지 포켓, 지지 포켓을 둘러싸는, 제 2 평면에 배치된 둘레 표면, 및 지지 포켓과 둘레 표면 사이에 포지셔닝된 복수의 센터링 탭들을 포함하는 페데스탈이 제공되며, 각각의 센터링 탭들은, 제 1 평면과 제 2 평면 양자 사이에 있는 제 3 평면에 배치된 표면을 갖는다.