N2O Scrubber for removing N2O contained in the waste gas

The present invention relates to a scrubber for reducing N_2O in a waste gas occurring in the electronic industry. The scrubber is a device to which a reduced or decomposed catalyst. The device comprises: a heating unit for feeding and heating a waste gas occurring during a process; and a reacting u...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KWON, WON TAE, YANG, CHANG HEE, KHA, MYOUNG JIN, KIM, JIN YOUNG, KIM, HYUN HO, KIM, DAE SU, PARK, WAN KEUN, NOH, HAK JAE, CHANG, WON CHUL, LEE, MIN WOO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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