STYLUS AND MEASUREMENT METHOD

A stylus comprises: a shaft (7); a protrusion (2) of a single crystal diamond disposed on a tip of the shaft; and a spherical portion (1) of the single crystal diamond disposed on a tip of the protrusion, in which {100} a plane (4) is disposed on a top tip of the spherical portion, and the protrusio...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUBO MASAHIRO, TAKASU YOSHIFUMI
Format: Patent
Sprache:eng ; kor
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