STYLUS AND MEASUREMENT METHOD

A stylus comprises: a shaft (7); a protrusion (2) of a single crystal diamond disposed on a tip of the shaft; and a spherical portion (1) of the single crystal diamond disposed on a tip of the protrusion, in which {100} a plane (4) is disposed on a top tip of the spherical portion, and the protrusio...

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Bibliographische Detailangaben
Hauptverfasser: KUBO MASAHIRO, TAKASU YOSHIFUMI
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:A stylus comprises: a shaft (7); a protrusion (2) of a single crystal diamond disposed on a tip of the shaft; and a spherical portion (1) of the single crystal diamond disposed on a tip of the protrusion, in which {100} a plane (4) is disposed on a top tip of the spherical portion, and the protrusion comprises {111} a plane (5) and {110} a plane (6) distributed within an annular region (30) on a side of the shaft rather than the spherical portion, and {110} the plane (5) and {111} the plane (6) protrude within the annular region. 축부(7)와, 축부의 선단에 배치된 단결정 다이아몬드의 돌출부(2)와, 돌출부의 선단에 배치된 단결정 다이아몬드의 구형상부(1)를 구비하고, 구형상부의 최선단부에 {100}면(4)이 배치되고, 돌출부는, 구형상부보다 축부측의 환상 영역(30) 내에, {111}면(5) 및 {110}면(6)이 분포하고, 또한, 환상의 영역 내에 있어서, {110}면(5) 및 {111}면(6)이 돌출되어 있다.