Optical module unit having parallel rays and apparatus of exposure for scanning

Disclosed are an optical module unit capable of obtaining precise parallel rays with a simple structure and an exposure apparatus which reduces the scale of facilities and implements both-sided exposure in an easy manner using one optical module unit. The unit comprises: a first lens arranged on one...

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Bibliographische Detailangaben
Hauptverfasser: LEE, HOON, LIM, GEUN TAEK
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:Disclosed are an optical module unit capable of obtaining precise parallel rays with a simple structure and an exposure apparatus which reduces the scale of facilities and implements both-sided exposure in an easy manner using one optical module unit. The unit comprises: a first lens arranged on one side according to an optical axis of LED light sources and receiving light emitted from the LED light sources; a second lens arranged on one side of the first lens according to the optical axis of LED light sources and concentrating light having passed through the first lens; and a fifth lens arranged on one side of the second lens according to the optical axis of LED light sources and converting the light having passed through the second lens into parallel rays. A plurality of optical module units is combined to form an array and treats an object to be exposed in a rotating carrier and roll type. 간단한 구조로 정밀한 평행광을 얻을 수 있는 광학모듈 유닛 및 하나의 광학모듈 유닛을 이용하여, 설비의 규모를 간소하게 하고 양면노광을 쉽게 구현하는 노광장치를 제시한다. 그 유닛 및 장치는 LED 광원의 광축에 따라 일측에 배치되며 LED 광원으로부터 방출된 광을 수렴하는 제1 렌즈, LED 광원의 광축에 따라 제1 렌즈의 일측에 배치되며 제1 렌즈를 거친 광을 집속하는 제2 렌즈, LED 광원의 광축에 따라 제2 렌즈의 일측에 배치되며 제2 렌즈를 거친 광을 평행광으로 변환시키는 제5 렌즈를 포함하고, 복수개의 광학모듈 유닛은 조합되어 어레이를 이루며, 회전하는 캐리어 및 롤 타입으로 피노광체를 처리한다.