SUBSTRATE TRAY

The present invention relates to a substrate tray mounting a plurality of substrates to perform a semiconductor process, shielding a part of the upper exposed surface of the substrate tray, thus improving a substrate processing efficiency. According to the present invention, the substrate tray compr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KIM, JAE HO, HONG, SA IN, KIM, DOO SIK, PARK, CHEON WOONG, LEE, GI SOO, YOO, JONG HYUN, JANG, DONG HYUN, MYOUNG, JU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	The present invention relates to a substrate tray mounting a plurality of substrates to perform a semiconductor process, shielding a part of the upper exposed surface of the substrate tray, thus improving a substrate processing efficiency. According to the present invention, the substrate tray comprises: at least one pocket wherein a substrate is loaded; and a tray shield unit to shield at least part of the upper surface. 본 발명은 다수의 기판을 탑재하여 반도체 공정을 수행하는 기판 트레이에 대한 것이다. 본 발명은, 기판을 로딩하는 적어도 하나의 포켓; 및 상부면의 적어도 일부를 차폐하는 트레이 차폐부;를 포함하는 기판 트레이를 제공한다.