Laser processing method using an angle of inclination of laser beam

The present invention discloses a method of machining a laser beam using an angle of inclination of a laser beam. The disclosed method of machining a laser beam is a method of irradiating a laser beam to an edge part of an object to be machined stacked on a stage to remove an edge part. The present...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: GONG, TAE WON, LEE, JUNG YONG, CHANG, EUI SOON, KIM, BYOUNG CHEOL
Format: Patent
Sprache:eng ; kor
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The present invention discloses a method of machining a laser beam using an angle of inclination of a laser beam. The disclosed method of machining a laser beam is a method of irradiating a laser beam to an edge part of an object to be machined stacked on a stage to remove an edge part. The present invention comprises: a step of passing a laser beam through a focusing lens; and a step of irradiating an inclined beam including an inclined external surface with respect to a central axis of the focusing lens among the laser beams passing through the focusing lens to an edge of the object to be machined. The edge part of the object to be machined is machined to be inclined corresponding to an external surface of the inclined beam. Accordingly, the present invention provides a method of machining a laser beam capable of removing only an edge part of an upper member of an object to be machined formed in a laminate type. 레이저 빔의 경사각을 이용한 레이저 가공방법이 개시된다. 개시된 레이저 가공방법은 스테이지에 적재된 가공대상물의 가장자리 부분에 레이저 빔을 조사하여 상기 가장자리 부분을 제거하는 방법으로, 상기 레이저 빔을 집속 렌즈에 통과시키는 단계; 및 상기 집속 렌즈를 통과한 상기 레이저 빔 중 상기 집속 렌즈의 중심축에 대해 경사진 외면을 포함하는 경사빔을 상기 가공대상물의 가장자리에 조사하는 단계;를 포함하고, 상기 가공대상물의 가장자리 부분은 상기 경사빔의 외면에 대응하여 경사지게 가공된다.