FAN-OUT SEMICONDUCTOR PACKAGE AND MANUFACTURING METHOD FOR THE SAME
The present invention relates to a fan-out semiconductor package and a manufacturing method thereof. The fan-out semiconductor package comprises: a first connection member having a through hole; a semiconductor chip which is arranged on the through hole of the first connection member and has an acti...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | The present invention relates to a fan-out semiconductor package and a manufacturing method thereof. The fan-out semiconductor package comprises: a first connection member having a through hole; a semiconductor chip which is arranged on the through hole of the first connection member and has an active surface with an access pad and a non-active surface arranged on an opposite side of the active surface; an enclosing material to enclose at least a portion of the non-active surface of the semiconductor chip and the first connection member; and a second connection member arranged on the active surface of the semiconductor chip and the first connection member and provided with a rewiring layer electrically connected to the access pad. The first connection member includes a first insulation layer, a first rewiring layer which comes in contact with the second connection member and is buried in the first insulation layer, and a second rewiring layer arranged on a side of the first insulation layer opposite to a side where the first rewiring layer is buried. The first and the second rewiring layer are electrically connected to the access pad.
본 개시는 관통홀을 갖는 제1연결부재; 상기 제1연결부재의 관통홀에 배치되며 접속패드가 배치된 활성면 및 상기 활성면의 반대측에 배치된 비활성면을 갖는 반도체칩; 상기 제1연결부재 및 상기 반도체칩의 비활성면의 적어도 일부를 봉합하는 봉합재; 및 상기 제1연결부재 및 상기 반도체칩의 활성면 상에 배치되며 상기 접속패드와 전기적으로 연결된 재배선층을 포함하는 제2연결부재; 를 포함하며, 상기 제1연결부재는 제1절연층, 상기 제2연결부재와 접하며 상기 제1절연층에 매립된 제1재배선층, 및 상기 제1절연층의 상기 제1재배선층이 매립된측의 반대측 상에 배치된 제2재배선층을 포함하고, 상기 제1 및 제2재배선층은 상기 접속패드와 전기적으로 연결된, 팬-아웃 반도체 패키지 및 그 제조방법에 관한 것이다. |
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