Method for development of the transfer printing using cilia structure

A transfer printing method of an electronic device according to an embodiment of the present invention includes the steps of: forming a sacrificial layer on a handling substrate; forming a protective layer on the sacrificial layer; forming a polymer substrate on the protective layer; forming a patte...

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Bibliographische Detailangaben
Hauptverfasser: KIM, HEE JE, KO, HEUNG CHO, YOON, JONG WON, YOO, SEONG GWANG, HWANG, YOUNG KYU, JEON, YUN KYUNG
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:A transfer printing method of an electronic device according to an embodiment of the present invention includes the steps of: forming a sacrificial layer on a handling substrate; forming a protective layer on the sacrificial layer; forming a polymer substrate on the protective layer; forming a pattern on the polymer substrate, and forming an adhesive rod with a cilia shape on a lateral side of the polymer substrate; forming a support layer on the polymer substrate on which the adhesive rod is formed; and performing a transfer printing operation on an object to be printed while dissolving the support layer after removing the sacrificial layer and the protective layer and turning over the same. Accordingly, the present invention can minimize mismatch on an interface, secure a sufficient contact surface and a sufficient bonding force, and maintain a property of the substrate. 본 발명의 일 실시예에 따른 전자소자의 전사 인쇄방법은 핸들링 기판 위에 희생층을 형성하는 과정, 상기 희생층 위에 보호층을 형성하는 과정, 상기 보호층 위에 고분자 기판을 형성하는 과정, 상기 고분자 기판 위에 패턴을 형성하고, 상기 고분자 기판의 측면에 섬모 형상의 접착로드를 형성하는 과정, 상기 접착로드가 형성된 고분자 기판 위에 지지층을 형성하는 과정 및 상기 희생층 및 상기 보호층을 제거하고, 뒤집어 지지층을 용해시키면서 피인쇄체에 전사 인쇄하는 과정을 포함한다.