2 Electronic Device Having 2 Dimensional Conduction Layer
In the present invention, disclosed is an electronic device including a two-dimensional (2D) conductive layer. The electronic device includes a substrate, the 2D conductive layer which is formed by using only the conductive material or mixing the conductive material with insulation oxide on an upper...
Gespeichert in:
| Hauptverfasser: | , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; kor |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | In the present invention, disclosed is an electronic device including a two-dimensional (2D) conductive layer. The electronic device includes a substrate, the 2D conductive layer which is formed by using only the conductive material or mixing the conductive material with insulation oxide on an upper side of the substrate, and an insulation layer which is formed on an upper side of the 2D conductive layer. The 2D conductive layer is made of an n-type oxide semiconductor material or a p-type oxide semiconductor material. Accordingly, the present invention can control an artificial composition of the 2D conductive layer and control a property according to the composition by directly forming the 2D conductive layer on the surface of the substrate with an atom layer deposition method.
본 발명은 기판과 상기 기판의 상부에 전도성 물질 단독으로 또는 전도성 물질에 절연성 산화물이 혼합되어 형성되는 2 차원 전도층 및 상기 2 차원 전도층의 상부에 형성되는 절연층을 포함하며, 상기 2 차원 전도층은 n형 산화물 반도체 물질 또는 p형 산화물 반도체 물질로 형성되는 것을 2 차원 전도층을 구비하는 전자 소자를 개시한다. |
|---|