SUBSTRATE PROCESSING APPARATUS METHOD FOR DETECTING VERTICAL POSITION OF LIFT PIN METHOD FOR ADJUSTING VERTICAL POSITION OF LIFT PIN AND METHOD FOR DETECTING ABNORMALITY OF LIFT PIN
Provided is a substrate processing apparatus to accurately locate and fit a vertical point of a lift pin in a short time. The present invention has the following steps: issuing a drive command for a motor to a driving unit of a lift pin device from a driving control unit (51) of a control unit (50);...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | Provided is a substrate processing apparatus to accurately locate and fit a vertical point of a lift pin in a short time. The present invention has the following steps: issuing a drive command for a motor to a driving unit of a lift pin device from a driving control unit (51) of a control unit (50); receiving the drive command, and the motor driving rotationally with a rotation speed and torque corresponding to a command purse so as to drive a lift pin upwardly; a touch detector (53) detecting an output value of a servo amp; and for instance, if an absolute value of an accumulated purse which is an integrated value of the command purse of a deviation counter within the servo amp is greater than a critical value, a front portion of the lift pin is determined to be in touch with the bottom surface of a loaded material.
(과제) 리프트 핀의 높이 위치를 단시간에 정확하게 위치 맞춤할 수 있는 기판 처리 장치를 제공한다. (해결 수단) 제어부(50)의 구동 제어부(51)로부터, 리프트 핀 장치의 구동부에 모터의 구동 지령을 발한다. 이 구동 지령을 받아, 모터가, 지령 펄스에 따른 회전 속도 및 토크로 회전 구동하고, 리프트 핀을 상승 구동시킨다. 맞닿음 검지부(53)는, 서보 앰프로부터의 출력값을 감시한다. 예컨대, 서보 앰프 내의 편차 카운터에 있어서의 지령 펄스의 적산값인 축적 펄스의 절대값이 임계값을 넘은 경우에, 리프트 핀의 선단이, 탑재물의 하면에 맞닿았다고 판정한다. |
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