calibration method according to shrinkage using a real-time update of the alignment mark

The present invention relates to a correction method for shrinkage using real-time updating of an alignment mark, and more specifically, to a correction method for shrinkage using real-time updating of an alignment mark which can correct shrinkage and even when a plurality of laminates are shrunk du...

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Bibliographische Detailangaben
Hauptverfasser: KIM, JANG SEOP, BAE, SUNG MIN, CHAE, SEUNG SU, BAE, JUNG YOUN, BAE, IG SOON, LEE, SANG MIN
Format: Patent
Sprache:eng ; kor
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