PROBE CARD

The present invention provides a probe card. The probe card according to an embodiment of the present invention includes: a probe substrate having a plurality of probe needles installed thereon; an intermediate circuit layer which is electrically connected to the probe substrate; a main printed circ...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK, YOUNG GEUN, KIM, EUN YOUNG, HWANG, KYU HO, KIM, HYUN KU, JANG, KANG HO
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention provides a probe card. The probe card according to an embodiment of the present invention includes: a probe substrate having a plurality of probe needles installed thereon; an intermediate circuit layer which is electrically connected to the probe substrate; a main printed circuit board which receives an external test signal, outputs an electrical signal, and is electrically connected to the intermediate circuit layer; and a plurality of coaxial cables, both ends of which are electrically connected to the intermediate circuit layer and the main circuit board, respectively. The coaxial cables are connected to the intermediate circuit layer and the main printed circuit board in a socket manner to be attachable or detachable. 본 발명은 프로브 카드를 제안한다. 본 발명의 일 실시예에 따른 프로브 카드는 복수의 프로브 니들을 장착한 프로브 기판; 프로브 기판과 전기적으로 접속되는 중간 회로층; 외부 테스트 신호를 수신하여, 전기 신호를 출력하고, 중간 회로층과 전기적으로 접속되는 메인 인쇄 회로 기판; 및 양단부가 각각 중간 회로층과 메인 회로기판에 전기적으로 연결되는 복수의 동축 케이블을 포함하되, 동축 케이블은 중간 회로층과 메인 인쇄 회로 기판에 탈부착이 가능하도록 소켓방식으로 연결된다.