SUBSTRATE LIFT PIN ACTUATOR

The present invention relates to a lift pin actuator. The lift pin actuator has a housing. The housing has an interior volume. A track is disposed in the interior volume, and is coupled to the housing. A center shaft is at least partially disposed in the interior volume. A guide is movably coupled t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WILLWERTH MICHAEL D, COTLEAR ROBERTO CESAR
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAULING HOISTING HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDEDFOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCEDIRECTLY TO THE SURFACE OF A LOAD LIFTING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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