USE OF PLASMA-RESISTANT ATOMIC LAYER DEPOSITION COATINGS TO EXTEND THE LIFETIME OF POLYMER COMPONENTS IN ETCH CHAMBERS

According to the disclosure, several inventions are provided, including an apparatus and a method for depositing plasma-resistant coatings on polymeric materials used in a plasma processing chamber. In a particular example, such coating may be performed on a part of an electrostatic chuck. Here, the...

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Bibliographische Detailangaben
Hauptverfasser:	STEVENSON THOMAS R, KERNS JOHN MICHAEL, XU LIN, ANDERSON NASH W, DAUGHERTY JOHN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM METALLURGY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Zusammenfassung:	According to the disclosure, several inventions are provided, including an apparatus and a method for depositing plasma-resistant coatings on polymeric materials used in a plasma processing chamber. In a particular example, such coating may be performed on a part of an electrostatic chuck. Here, the polymer material is a bead surrounding an adhesive between a chuck base and a top plate of ceramic. So, the lifetime of polymer components can be extended. 이 개시에 따르면, 플라즈마 프로세싱 챔버 내에서 사용되는 폴리머 재료들 상에 플라즈마 내성 코팅들을 증착하기 위한 장치 및 방법을 포함한, 몇몇의 발명들이 제공된다. 특정한 예에서, 이러한 코팅은 정전 척의 일부분 상에 행해질 수도 있고, 여기서 폴리머 재료는 척 베이스와 세라믹 상단 플레이트 사이의 접착제를 둘러싸는 비드이다.