SYSTEM AND METHOD FOR A CAPACITIVE THERMOMETER

Various embodiments described in the present specification comprise: a deflectable membrane; and capacitive thermometer having a sensing electrode. The deflectable membrane controls a capacitance value based on the temperature of the deflectable membrane. The capacitive thermometer comprises: a firs...

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Hauptverfasser: FIGUEIRA DA SILVA SYLVICLEY, HEDENIG URSULA, FRISCHMUTH TOBIAS, SCHMID ULRICH, IRSIGLER PETER, SILVANO DE SOUSA JONATHAN, GRILLE THOMAS
Format: Patent
Sprache:eng ; kor
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Zusammenfassung:Various embodiments described in the present specification comprise: a deflectable membrane; and capacitive thermometer having a sensing electrode. The deflectable membrane controls a capacitance value based on the temperature of the deflectable membrane. The capacitive thermometer comprises: a first heat substance; and a second heat substance. 본 명세서에 설명된 다양한 실시예는 편향가능한 멤브레인과 감지 전극을 포함하는 정전용량식 온도계를 포함한다. 편향가능한 멤브레인은 편향가능한 멤브레인의 온도에 기초하여 정전용량 값을 조정한다.