ELECTROSTATIC CHUCK FOR CONTROLLING CHUCKING AND DECHUCKING OF MASK

The present application relates to an electrostatic chuck. According to an embodiment of the present application, an electrostatic chuck comprises: a base portion formed of a metal material and including a coil; and a dielectric layer coated on one surface of the base portion. An anode or a cathode...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KANG, CHANG SU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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