MEMS SYSTEM AND METHOD FOR A MEMS SENSOR

According to one embodiment, a sensor circuit comprises: a sigma-delta analog/digital converter (ADC); a dithering clock coupled to the sigma-delta ADC; and a power voltage circuit coupled to the sigma-delta ADC. The sigma-delta ADC is configured to be coupled to a low frequency transducer, and the...

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Hauptverfasser:	STRAEUSSNIGG DIETMAR, ROMANI ERNESTO, MECHNIG STEPHAN, WIESBAUER ANDREAS, EBNER CHRISTIAN, JENKNER CHRISTIAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRONIC CIRCUITRY CODE CONVERSION IN GENERAL CODING DECODING ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING MAGNETIC VARIABLES MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR TRANSPORTING
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Beschreibung
Zusammenfassung:	According to one embodiment, a sensor circuit comprises: a sigma-delta analog/digital converter (ADC); a dithering clock coupled to the sigma-delta ADC; and a power voltage circuit coupled to the sigma-delta ADC. The sigma-delta ADC is configured to be coupled to a low frequency transducer, and the dithering clock is configured to control the sigma-delta ADC based on a dithering clock signal. 일 실시예에 따르면, 센서 회로는 시그마-델타 아날로그/디지털 컨버터(ADC), 시그마-델타 ADC에 결합되는 디더링 클럭, 및 시그마-델타 ADC에 결합되는 전원 전압 회로를 포함한다. 시그마-델타 ADC는 저주파 트랜스듀서에 결합되도록 구성되며, 디더링 클럭은 디더링 클럭 신호에 기초하여 시그마-델타 ADC를 제어하도록 구성된다.