OXYGEN SENSOR USING GRAPHENE
The present invention relates to an oxygen sensor which indicates an exposure degree to oxygen by measuring a resistance change caused by oxidation of graphene and can be permanently used by controlling a reducing process of the graphene by temperature control of a temperature controller installed i...
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | The present invention relates to an oxygen sensor which indicates an exposure degree to oxygen by measuring a resistance change caused by oxidation of graphene and can be permanently used by controlling a reducing process of the graphene by temperature control of a temperature controller installed in a lower portion of a silicon substrate. The oxygen sensor using graphene comprises: the substrate (10); a graphene layer (30); and two electrodes (40).
본 발명은 그래핀의 산화작용에 따른 저항의 변화를 측정하여 산소에 노출정도를 알 수 있고, 실리콘 기판의 하부에 설치되는 온도조절기의 온도조절에 따라 그래핀의 환원작용을 조절하여 영구적으로 사용 가능한 산소센서에 관한 것이다. |
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