THERMAL PROCESSING SYSTEM

An embodiment of the present invention relates to a heat treatment system which can mount and heat treat a maximum number of substrates for display devices in a minimum space. The heat treatment system comprises: a plurality of support columns; a substrate support composed of a cantilever supporting...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, HUN SUNG, SEO, JI WON, JANG, JONG IL, SEO, BO IK, KWON, MUN HO, KWON, OH SUNG, KIM, HYUN SOO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ADVERTISING CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS CRYPTOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DISPLAY DISPLAYING EDUCATION FREQUENCY-CHANGING GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GLASS LABELS OR NAME-PLATES MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METALLURGY MINERAL OR SLAG WOOL NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEALS SIGNS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	An embodiment of the present invention relates to a heat treatment system which can mount and heat treat a maximum number of substrates for display devices in a minimum space. The heat treatment system comprises: a plurality of support columns; a substrate support composed of a cantilever supporting a substrate by being combined to the support column; an internal housing to having a form of a hexahedron with an opened front, wherein the substrate support is combined to the internal housing; an external housing which surrounds the internal housing, and has a form of a hexahedron with an opened front; and a declination prevention block close to the support column of the substrate support by penetrating the external housing. 본 발명의 일 실시예는 열처리 시스템에 관한 것으로, 해결하고자 하는 기술적 과제는 최소 공간에 최대 개수의 디스플레이용 기판을 거치하여 열처리할 수 있는 열처리 시스템을 제공하는데 있다. 이를 위해 본 발명은 다수의 지지 기둥과, 지지 기둥에 결합되어 기판을 지지하는 캔틸레버로 이루어진 기판 지지부; 기판 지지부가 결합되며, 전측이 개방된 육면체 형태의 내부 하우징; 내부 하우징을 감싸며, 전측이 개방된 육면체 형태의 외부 하우징; 및, 외부 하우징을 관통하여 기판 지지부의 지지 기둥에 밀착된 기움 방지 블럭으로 이루어진 열처리 시스템을 개시한다.