ATOMIC FORCE MICROSCOPE WITH INTEGRATED HEAD AND FUSION MICROSCOPE INCLUDING THE SAME

The purpose of the present invention is to provide an integrated head for an atomic force microscope (AFM) having minimum weight and volume, and an improved structural stability through an optimization of a head structure of the AFM. Another purpose of the present invention is to provide a head-integrated AFM which has the above integrated head mounted thereon, having an improved dynamic characteristic such that a high-speed head scan is enabled, and the AFM is able to be used for a wide-area sample imaging. A further purpose of the present invention is to provide a fusion microscope comprising a head-integrated AFM. The fusion microscope is a combination of the above head-integrated AFM having an improved dynamic characteristic and an electron microscope or an optical microscope such that a high-speed location searching and imaging, as well as detailed observation of 3D shapes in an interest area on an atomic level are possible. The head-integrated for an AFM comprises: a measuring unit (110) formed as a plate extended from one side to an other side thereof in a longitudinal direction, in which a first mirror mount (111) having a first mirror (211) and a second mirror mount (112) having a second mirror (212) are consecutively placed and fixated in a predetermined distance away from each other from one side to the other side in the longitudinal direction, and a tip mount (115) having a tip (215) which has a probe and formed as a plate extended in the longitudinal direction placed from the first mirror mount (111) at a distance and fixated in a height direction and a width direction, and a lower part of the tip (215) having an empty space; a source unit (120) formed as a block connected to one side of the measuring unit (110) which has a through-path (125) in the longitudinal direction on which a lens (225) is provided of which an end portion of one side has a fixated light source unit (220); and a sensing unit (130) formed as a block connected to the other side of the measuring unit (110) which has an accommodating path (135) in the longitudinal direction whereon position-sensitive photo detector (PSPD) (230) is accommodated and fixated. 본 발명의 목적은 원자간력 현미경(AFM)의 헤드 구조를 최적화함으로써, 중량 및 부피 최소화와 구조적 안정성 향상을 실현하는 원자간력 현미경용 일체형 헤드를 제공함에 있다. 본 발명의 다른 목적은, 이러한 일체형 헤드를 장착함으로써 동적 특성이 향상되어 고속 헤드 스캔이 가능해서 대면적 샘플 이미징에 활용할 수 있는 헤드 일체형 원자간력 현미경을 제공함에 있다. 본 발명의 또다른 목적은, 이처럼 동적 특성이 향상된 헤드 일체형 원자간력 현미경과 전자 현미경 또는 광학 현미경을 융합함으로써, 고속 위치탐색 및 이미징이 가능함과 동시에 관심 영역에서는 원자상 수준까지의 3차원