METHOD FOR INSPECTING SURFACE

According to a technical idea of the present invention, a method to inspect a surface comprises: a step of irradiating a test object by changing incident light of a first polarization state into parallel light having a cross section; and a step of measuring the second polarization state of light ref...

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Bibliographische Detailangaben
Hauptverfasser:	KO, KANG WOONG, LEE, SANG KIL, HORIE MASAHIRO, JEON, HYOUNG JO, KO, WOO SEOK, HAN, SANG KYEONG, JEON, BYEONG HWAN, YANG, YU SIN, SOHN, YOUNG HOON, AHN, TAE HEUNG, RYU, SUNG YOON, SONG, GIL WOO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	According to a technical idea of the present invention, a method to inspect a surface comprises: a step of irradiating a test object by changing incident light of a first polarization state into parallel light having a cross section; and a step of measuring the second polarization state of light reflected from the test object. Inspection on the entire area to which the incident light is emitted in an inspection object is able to be carried out using a variation between the first polarization state and the second polarization state. As such, the speed of inspection is able to be improved. 본 발명의 기술적 사상에 따른 표면 검사 방법은, 제1 편광 상태의 입사광을 단면적을 가지는 평행 광선으로 조정하여 검사 대상에 조사하는 단계; 및 상기 검사 대상으로부터 반사되는 반사광의 제2 편광 상태를 측정하는 단계;를 포함하고, 상기 제1 편광 상태와 상기 제2 편광 상태의 변화량을 이용하여, 상기 검사 대상 중 상기 입사광이 조사된 전체 면적에 대한 검사가 이루질 수 있다.