SEMICONDCUTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME

A method for manufacturing a semiconductor device according to an embodiment of the present invention comprises the steps of: forming split gate structures including a floating gate electrode layer and a control gate electrode layer in a cell region of a substrate including the cell region and a log...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK, JAE HYUN, YU, TEA KWANG, KIM, YONG TAE, YEOM, KYONG SIK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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