LAMINATE, TREATMENT METHOD OF SUBSTRATE, COMPOSITION FOR TEMPORARY FIXING AND SEMICONDUCTOR DEVICE

The present invention is to provide a laminate capable of satisfactorily preventing a substrate from being damaged when the substrate is peeled off from a supporter, wherein the substrate and the supporter are held by a temporary fixing material. In the laminate, a substrate having a circuit face is...

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Bibliographische Detailangaben
Hauptverfasser: MARUYAMA YOUICHIROU, INOMATA KATSUMI, YAJIMA KEISUKE, ISHII HIROYUKI, TAMURA KOUSUKE, YAMAGUCHI TORAHIKO, WAKIUCHI ARAKI, MATSUMURA TOORU
Format: Patent
Sprache:eng ; kor
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Zusammenfassung:The present invention is to provide a laminate capable of satisfactorily preventing a substrate from being damaged when the substrate is peeled off from a supporter, wherein the substrate and the supporter are held by a temporary fixing material. In the laminate, a substrate having a circuit face is temporarily fixed onto a supporter through a temporary fixing material, the temporary fixing material includes a temporary fixing material layer (I) which comes in contact with the circuit face of the substrate and a temporary fixing material layer (II) which is formed on a face of the supporter side in the layer (I), the temporary fixing material layer (I) is a layer which is formed of a temporary fixing composition (i) containing thermoplastic resin (Ai), a multifunctional (meth) acrylate compound (Bi), and a radical polymerization initiator (Ci), and the temporary fixing material layer (II) is a layer which is formed of a temporary fixing composition (ii) containing thermoplastic resin (Aii) and a release agent (Dii). (과제) 지지체로부터 기재(基材)를 박리할 때에 기재의 파손을 양호하게 막는 것이 가능한, 기재 및 지지체가 가(假)고정재에 의해 보유지지(保持)되어 이루어지는 적층체를 제공한다. (해결 수단) 회로면을 갖는 기재가 가고정재를 개재하여 지지체 상에 가고정된 적층체이고, 상기 가고정재가, 상기 기재의 회로면과 접한 가고정재층 (Ⅰ)과, 상기 층 (Ⅰ)에 있어서의 지지체측의 면 상에 형성된 가고정재층 (Ⅱ)를 갖고, 상기 가고정재층 (Ⅰ)이, 열가소성 수지 (Aⅰ)과, 다관능 (메타)아크릴레이트 화합물 (Bⅰ)과, 라디칼 중합 개시제 (Cⅰ)을 함유하는 가고정용 조성물 (ⅰ)로 형성된 층이고, 상기 가고정재층 (Ⅱ)가, 열가소성 수지 (Aⅱ)와, 이형제 (Dⅱ)를 함유하는 가고정용 조성물 (ⅱ)로 형성된 층인 것을 특징으로 하는 적층체.