CONTACT WASHING APPARATUS
A contact type washing system is disclosed. The contact type washing system according to an embodiment of the present invention comprises: a washing cloth supply unit which comes in contact with a remaining film of a substrate to remove the remaining film from the substrate and supplies a washing cl...
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Sprache: | eng ; kor |
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Zusammenfassung: | A contact type washing system is disclosed. The contact type washing system according to an embodiment of the present invention comprises: a washing cloth supply unit which comes in contact with a remaining film of a substrate to remove the remaining film from the substrate and supplies a washing cloth for washing the remaining cloth; and a washing solution spray unit which sprays a predetermined amount of a washing solution to the washing cloth supplied from the washing cloth supply unit, wherein the washing solution spray unit comprises: a washing solution supply tank which is filled with the washing solution; and a washing solution supply control roller which guides the washing cloth and controls the supplied amount of the washing solution sprayed to the washing solution, thereby reducing the excessive consumption of the washing solution.
접촉식 세정 장치가 개시된다. 본 발명의 일 실시예에 따른 접촉식 세정 장치는, 기재의 잔막 제거를 위해 상기 잔막에 접촉되어 상기 잔막을 세정하는 세정포를 공급하는 세정포 공급 유닛; 및 상기 세정포 공급 유닛에서 공급되는 세정포에 미리 결정된 양만큼의 세정액을 도포하는 세정액 도포 유닛을 포함하며, 상기 세정액 도포 유닛은, 상기 세정액이 충전되는 세정액 공급조; 및 상기 세정포를 가이드하면서 상기 세정포에 도포되는 상기 세정액의 공급량을 조절하는 세정액 공급량 조절 롤러를 포함한다. |
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