LEVITATION TRANSPORTATION APPARATUS

Provided is a levitation transport apparatus capable of levitating and transporting a substrate without damaging the substrate. The levitation transport apparatus (1) comprises: a levitation stage (2) for levitating a substrate W; a hand unit (51) having a contact unit (53) which is in contact with...

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Bibliographische Detailangaben
1. Verfasser:	MIYAJIMA YUYA
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ADVERTISING CRYPTOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DISPLAY DISPLAYING EDUCATION FREQUENCY-CHANGING LABELS OR NAME-PLATES NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEALS SIGNS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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