COATING APPARATUS AND COATING METHOD FOR A SUBSTRATE

The present invention provides an apparatus and method for coating a substrate which enables a hardening process of a coating solution by a hardening means followed by a nozzle to be homogenized in order to uniformize the thickness of a coating layer of the substrate even when the nozzle is moved to...

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Bibliographische Detailangaben
1. Verfasser: TOUCHI HACHIROU
Format: Patent
Sprache:eng ; kor
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