SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

The present invention relates to a semiconductor element and a manufacturing method thereof. The method includes the steps of: forming a sacrificial gate pattern on a substrate; forming a first spacer exposing an upper part of a side wall of the sacrificial gate pattern on the side wall; covering th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOO, KYUNG BUM, ZULKARNAIN, LEE, JEONG KYU, LEE, SEUNG JAE, KIM, SHIN HYE, OH,RAE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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