APPARATUS FOR MANUFACTURING INGOT

An apparatus for manufacturing an ingot is disclosed. According to an embodiment of the present invention, an apparatus for manufacturing an ingot comprises: a chamber; a crucible having a melting zone melted with a silicon particle and arranged inside the chamber; an inner wall having a growth zone...

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Bibliographische Detailangaben
Hauptverfasser:	KWON, HYUN GOO, SON, MIN SOO, YOON, YEO KYUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CRYSTAL GROWTH ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	An apparatus for manufacturing an ingot is disclosed. According to an embodiment of the present invention, an apparatus for manufacturing an ingot comprises: a chamber; a crucible having a melting zone melted with a silicon particle and arranged inside the chamber; an inner wall having a growth zone in which an ingot grows from a silicon melt solution introduced from the melting zone, and arranged inside the crucible; a feeding unit for supplying the silicon particle and sweeping gas to the inside of the chamber; and a suction unit for discharging the sweeping gas supplied through the feeding unit to the outside of the chamber, and surrounding the feeding unit.