METHODS FOR ELECTROCHEMICAL DEPOSITION OF MULTI-COMPONENT SOLDER USING CATION PERMEABLE BARRIER

Described are processes and systems for electrochemical deposition of a multi-component solder by processing a microfeature workpiece with a first processing fluid and an anode. Microfeature workpieces are electrolytically processed by using a first processing fluid, an anode, a second processing fl...

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Bibliographische Detailangaben
Hauptverfasser: KULZER ROSS, BERNT MARVIN L
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:Described are processes and systems for electrochemical deposition of a multi-component solder by processing a microfeature workpiece with a first processing fluid and an anode. Microfeature workpieces are electrolytically processed by using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids.