MICRO-COLUMN HAVING A SOURCE LENS WHICH COMPRISES FOUR ELECTRODES WITH IMPROVED PROBE CURRENT

MICRO-COLUMN HAVING A SOURCE LENS WHICH COMPRISES FOUR ELECTRODES WITH IMPROVED PROBE CURRENT

The present invention relates to a microcolumn including a source lens of a quadrupole lens layer and, more specifically, to a microcolumn to enhance the resolution thereof and to increase a probe current thereof.

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Bibliographische Detailangaben
Hauptverfasser: AHN, SEUNG JUN, KIM, HO SEOB, KIM, DAE WOOK, OH, TAE SIK
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:The present invention relates to a microcolumn including a source lens of a quadrupole lens layer and, more specifically, to a microcolumn to enhance the resolution thereof and to increase a probe current thereof.