HEAD CLEANING UNIT, HEAD CLEANING METHOD AND SUBSTRATE TREATING APPARATUS INCLUDING HEAD CLEANING UNIT

Disclosed are a head cleaning unit and a method for cleaning a liquid injection surface of a head for injecting liquid. A head cleaning unit for cleaning the liquid injection surface of a head for injecting liquid according to the embodiment of the present invention includes a cleaning roller which...

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Bibliographische Detailangaben

1. Verfasser:	LEE, KWANG RYUL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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