HEAD CLEANING UNIT, HEAD CLEANING METHOD AND SUBSTRATE TREATING APPARATUS INCLUDING HEAD CLEANING UNIT

Disclosed are a head cleaning unit and a method for cleaning a liquid injection surface of a head for injecting liquid. A head cleaning unit for cleaning the liquid injection surface of a head for injecting liquid according to the embodiment of the present invention includes a cleaning roller which...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	LEE, KWANG RYUL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Disclosed are a head cleaning unit and a method for cleaning a liquid injection surface of a head for injecting liquid. A head cleaning unit for cleaning the liquid injection surface of a head for injecting liquid according to the embodiment of the present invention includes a cleaning roller which is arranged under the head, touches the remaining solution of the liquid injection surface while rotating, and cleans the remaining liquid, a rotation driving member which rotates the cleaning roller to touch the liquid injection surface, and a horizontal driving member which straightly moves the cleaning roller. The present invention can improve washing degree by effectively removing liquid remaining on the nozzle surface of a head. 본 발명은 액을 토출하는 헤드의 액 토출면을 세정하는 헤드 세정 유닛 및 방법을 개시한다. 본 발명의 일 실시예에 따라 액을 토출하는 헤드의 액 토출면을 세정하는 헤드 세정 유닛은, 상기 헤드의 아래에 배치되어, 회전하면서 상기 액 토출면의 잔류액과 접촉되어 상기 잔류액을 닦아내는 세정 롤러와, 상기 액 토출면에 접촉되도록 상기 세정 롤러를 회전시키는 회전 구동 부재와, 회전되는 상기 세정 롤러를 직선으로 이동시키는 수평 구동 부재를 포함한다. 상기와 같은 본 발명은 헤드의 노즐면에 잔류하는 액을 효율적으로 제거하여 세정도를 향상시킬 수 있다.