SOLVENT FOR TREATING AROMATIC POLYMER AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE

According to the present invention, a solvent for treating an aromatic polymer comprises at least one species of C8-C11 aromatic hydrocarbons, thereby effectively treating an aromatic polymer, particularly, effectively treating an aromatic polymer coated on the outer and back sides of a semiconducto...

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Bibliographische Detailangaben
Hauptverfasser:	JEONG, SUN HYOUNG, RYOU, JOON SUNG, OH, SEUNG BAE, KIM, SANG TAI, KIM, YOUNG HO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	According to the present invention, a solvent for treating an aromatic polymer comprises at least one species of C8-C11 aromatic hydrocarbons, thereby effectively treating an aromatic polymer, particularly, effectively treating an aromatic polymer coated on the outer and back sides of a semiconductor substrate. 본 발명에 따른 방향족 폴리머 처리 용제는 1종 이상의 C8-C11 방향족 탄화수소를 포함함으로써 효과적으로 방향족 폴리머를 처리할 수 있으며, 특히 반도체 기판의 외곽 및 이면에 코팅된 방향족 폴리머를 효과적으로 처리할 수 있다.