TEST HANDLER

The present invention relates to a technology for controlling a temperature of a semiconductor device tested in a test hander. According to the present invention, the technology reduces a deviation between temperatures of semiconductor devices and a set temperature by making the diameter of a nozzle...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NA, YUN SUNG, YO, DONG HYUN, CHOI, HEON SIK
Format: Patent
Sprache:eng ; kor
Schlagworte:
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Beschreibung
Zusammenfassung:The present invention relates to a technology for controlling a temperature of a semiconductor device tested in a test hander. According to the present invention, the technology reduces a deviation between temperatures of semiconductor devices and a set temperature by making the diameter of a nozzle at a location where injection pressure is low larger than those of other nozzles, thereby securing the reliability of a test. 본 발명은 테스트핸들러에서 테스트되는 반도체소자의 온도를 조절하기 위한 기술에 관한 것이다. 본 발명에 따르면 분사 압력이 낮은 위치에 있는 분사구의 직경을 다른 분사구보다 더 크게 함으로써 반도체소자들의 온도와 설정 온도 간의 편차를 줄여 테스트의 신뢰성을 담보할 수 있는 기술이 개시된다.