COATING APPARATUS AND COATING METHOD

A transfer unit which transfers a substrate held by a holding unit for maintaining the substrate is formed in a substrate transferring unit. An auxiliary unit for pressurizing the substrate to the holding unit is formed, and thereby, the substrate can be maintained by the holding unit of the transfe...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	TAKASE SHINJI, TATSUMA NAONOBU, TANIMOTO TSUNEO, MASU YOSHIAKI, SHIMIZU AKIHIRO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HANDLING THIN OR FILAMENTARY MATERIAL HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A transfer unit which transfers a substrate held by a holding unit for maintaining the substrate is formed in a substrate transferring unit. An auxiliary unit for pressurizing the substrate to the holding unit is formed, and thereby, the substrate can be maintained by the holding unit of the transfer unit and the auxiliary unit. Therefore, the substrate is strongly supported so the misalignment of the substrate can be prevented. As a result, coating errors due to the misalignment of the substrate can be prevented. The upper part of the substrate transferring unit can be cleaned. 기판을 유지하는 유지부를 갖고 기판을 유지한 상태에서 반송하는 반송 기구가 기판 반송부에 형성되어 있고, 당해 기판을 유지부에 가압하는 보조 기구를 구비하는 것으로 하였으므로, 반송 기구의 유지부에 추가하여 보조 기구에 의해서도 기판을 유지할 수 있다. 이 때문에, 기판이 보다 강하게 유지되게 되고, 그 만큼 기판의 어긋남이 억제되게 된다. 이로써, 기판의 어긋남에 수반되는 도포 불량을 방지할 수 있어, 기판 반송부 상을 청정하게 유지할 수 있게 된다.