SUBSTRATE DETECTION DEVICE FOR SUBSTRATE PROCESSING APPARATUS

The present invention relates to a substrate detection device for a substrate processing apparatus comprising: a body unit having an insertion groove; a vertically moving body unit inserted into the insertion groove of the body unit to downwardly move to a perpendicular direction in accordance with...

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Bibliographische Detailangaben
1. Verfasser:	HAN, HEUNG SOO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	DETECTING MASSES OR OBJECTS GEOPHYSICS GRAVITATIONAL MEASUREMENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The present invention relates to a substrate detection device for a substrate processing apparatus comprising: a body unit having an insertion groove; a vertically moving body unit inserted into the insertion groove of the body unit to downwardly move to a perpendicular direction in accordance with contact of a substrate; a sensor unit detecting a change of magnetic field of a magnet arranged in the body unit in accordance with a movement of the body unit; and a restoring force supply unit providing a restoring force which upwardly restores the vertically moving body unit to an original position. According to the present invention, a substrate detection device for a substrate processing apparatus is comprised of vertically moving in accordance with contact of a substrate to minimize a space required for installation. 본 발명은 기판처리장치의 기판 감지장치에 관한 것으로, 삽입홈을 가지는 몸체부와, 상기 몸체부의 삽입홈에 삽입되어 기판의 접촉에 따라 직하방향으로 하향 이동하는 상하이동 몸체부와, 상기 몸체부의 이동에 따라 상기 몸체부에 마련된 자석의 자기장 변화를 검출하는 센서부와, 상기 상하이동 몸체부를 원래의 위치로 상향 복원하는 복원력을 제공하는 복원력제공부를 포함한다. 본 발명은 기판의 접촉 여부에 따라 상하로 이동하도록 구성함으로써, 설치에 요구되는 공간을 최소화할 수 있는 효과가 있다.