SYSTEM AND METHOD FOR GENERATING PULSE WITH LINEAR SLOPE

SYSTEM AND METHOD FOR GENERATING PULSE WITH LINEAR SLOPE

The present invention relates to an apparatus and a method for generating pulses for plasma applied to a semiconductor or a display process and, more specifically, to a system and a method for generating pulse power having a linear slope to supply even energy to ions in a plasma state. 본 발명은 반도체 또는...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LEE, TAY SEEK, SONG, JHONG HWAN
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
PULSE TECHNIQUE
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The present invention relates to an apparatus and a method for generating pulses for plasma applied to a semiconductor or a display process and, more specifically, to a system and a method for generating pulse power having a linear slope to supply even energy to ions in a plasma state. 본 발명은 반도체 또는 디스플레이 공정에 적용되는 플라즈마용 펄스 생성 장치 및 그 생성 방법에 관한 것이다. 구체적으로는, 플라즈마 상태 내의 이온에 균일한 에너지를 공급하기 위하여 선형 기울기를 가지는 펄스 전원을 생성하는 장치 및 방법에 관한 것이다.